Vacuum pumps

Diffusion pumps are static devices, that is, without moving mechanical parts, used as primary pumping devices in systems in which the required degree of vacuum is in the range between 1e-4 and 1e-9 mbar. These are the first devices developed capable of generating a pumping action in the so-called molecular vacuum regime, ie the one in which the free path of each molecule present in a closed chamber is greater than the size of the chamber itself.

Turbomolecular pumps are one of the most iconic parts of a vacuum deposition plant. Their appearance evokes the structure of a turbocompressors of the type used in commercial jet aircraft engines (turbofans).

In pumping systems for vacuum plants,, it is common to use rotary vane pumps. In these machines, the oil has important functions for the correct functioning of the machine.