Gas & process control
Insights on gas and process control from Alca Technology: mass flow controllers, measurement and regulation for precise vacuum and deposition processes.
Technical gases in vacuum deposition processes
- Insights
- Gas & process control
Many industrial vacuum deposition processes require an environment with a controlled composition of the environment: a certain amount of high purity technical gases is then continuously fed into the chambers, using controlled flow valves called MFC (Mass Flow Controllers).